Nanofabrication Core Facility Usage Fees

Fees for use of equipment and services have been established in accordance with GW’s policy on Interdepartmental Service Centers and Recharge Centers and with consultation and approval by the GW Office of the Comptroller. The fees are established to be competitive with similar resources.

Internal Users

  Internal user
Daytime
(per hour)
Internal user
Night/weekend
(per hour)
Raith Voyager EBL $100.00 $95.00
Raith Pioneer EBL $100.00 $95.00
Probe Station $100.00 $85.00
Profileometer $45.00 $35.00
Plasmatherm PECVD $100.00 $95.00
Plasmatherm RIE DRIE $100.00 $95.00
Plasmatherm ICP $100.00 $95.00
Fiji F200 ALD $100.00 $95.00
E-Beam Evaporators $40.00 $25.00
Sputter Deposition $65.00 $45.00
Mask Aligner $40.00 $25.00
Critical Point Dryer $100.00 $95.00
Spin Processors $20.00 $4.00
Spin Rinse Dryer $30.00 $12.00
Bonders $40.00 $24.00

External Users

  External user
Not-for-profit
Daytime
(per hour)
External user
Not-for-profit
Night/weekend
(per hour)
External user
Commercial
Daytime
(per hour)
External user
Commercial
Night/weekend
(per hour)
Raith Voyager EBL $159.50 $151.53 $300.00 $285.00
Raith Pioneer EBL $159.50 $151.53 $300.00 $285.00
Probe Station $159.50 $135.58 $300.00 $255.00
Profileometer $71.78 $55.83 $135.00 $105.00
Plasmatherm PECVD $159.50 $151.53 $300.00 $285.00
Plasmatherm RIE DRIE $159.50 $151.53 $300.00 $285.00
Plasmatherm ICP $159.50 $151.53 $300.00 $285.00
Fiji F200 ALD $159.50 $151.53 $300.00 $285.00
E-Beam Evaporators $63.80 $39.88 $120.00 $75.00
Sputter Deposition $103.68 $71.78 $195.00 $135.00
Mask Aligner $63.80 $39.88 $120.00 $75.00
Critical Point Dryer $159.50 $151.53 $300.00 $285.00
Spin Processors $31.90 $6.38 $60.00 $12.00
Spin Rinse Dryer $47.85 $19.14 $90.00 $36.00
Bonders $63.80 $38.28 $120.00 $72.00