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NANOFABRICATION AND IMAGING CENTER

 

FEI Teneo LV SEM

FEI Teneo SEMThe FEI Teneo LV SEM instrument is a Field Emission Scanning Electron Microscope (FESEM) that combines high and low-voltage ultra-high resolution capabilities with the world’s only low-vacuum, high-resolution imaging solution. Through lens detector for (TLD) SE and BSE detection capable of high-resolution imaging at both high and low kV’s, as well as an Everhart-Thornley SE detector for conventional SE detection. This microscope allows for large area imaging as well as elemental analysis on biological and materials science samples.

  • High-resolution FEG column with Schottky source
  • 110 x 110 mm, 5-axes motorized (x-y-z-tilt-rotate stage), eucentric stage
  • CCD IR inspection camera (NavCam)