Nanofabrication Core Facility Usage Fees
Fees for use of equipment and services have been established in accordance with GW’s policy on Interdepartmental Service Centers and Recharge Centers and with consultation and approval by the GW Office of the Comptroller. The fees are established to be competitive with similar resources.
Internal Users
Equipment
| Internal user Daytime (per hour) |
Internal user Night/weekend (per hour) |
|
|---|---|---|
| Raith Voyager EBL | $100.00 | $95.00 |
| Raith Pioneer EBL | $100.00 | $95.00 |
| Probe Station | $100.00 | $85.00 |
| Profileometer | $45.00 | $35.00 |
| Plasmatherm PECVD | $100.00 | $95.00 |
| Plasmatherm RIE DRIE | $100.00 | $95.00 |
| Plasmatherm ICP | $100.00 | $95.00 |
| Fiji F200 ALD | $100.00 | $95.00 |
| E-Beam Evaporators | $40.00 | $25.00 |
| Sputter Deposition | $65.00 | $45.00 |
| Mask Aligner | $40.00 | $25.00 |
| Critical Point Dryer | $100.00 | $95.00 |
| Spin Processors | $20.00 | $4.00 |
| Spin Rinse Dryer | $30.00 | $12.00 |
| Bonders | $40.00 | $24.00 |
Cleanroom Entry Fee
| Per Day | |
|---|---|
| Entry Fee (Charged upon first entry into cleanroom. No time limits or charges for re-entry on same day.) |
$50.00 |
Training & Consultation
| Internal user (per hour) | |
|---|---|
| Training & Consultation | $30.00 |
External Users
Equipment
| External user Not-for-profit Daytime (per hour) |
External user Not-for-profit Night/weekend (per hour) |
External user Commercial Daytime (per hour) |
External user Commercial Night/weekend (per hour) |
|
|---|---|---|---|---|
| Raith Voyager EBL | $159.50 | $151.53 | $300.00 | $285.00 |
| Raith Pioneer EBL | $159.50 | $151.53 | $300.00 | $285.00 |
| Probe Station | $159.50 | $135.58 | $300.00 | $255.00 |
| Profileometer | $71.78 | $55.83 | $135.00 | $105.00 |
| Plasmatherm PECVD | $159.50 | $151.53 | $300.00 | $285.00 |
| Plasmatherm RIE DRIE | $159.50 | $151.53 | $300.00 | $285.00 |
| Plasmatherm ICP | $159.50 | $151.53 | $300.00 | $285.00 |
| Fiji F200 ALD | $159.50 | $151.53 | $300.00 | $285.00 |
| E-Beam Evaporators | $63.80 | $39.88 | $120.00 | $75.00 |
| Sputter Deposition | $103.68 | $71.78 | $195.00 | $135.00 |
| Mask Aligner | $63.80 | $39.88 | $120.00 | $75.00 |
| Critical Point Dryer | $159.50 | $151.53 | $300.00 | $285.00 |
| Spin Processors | $31.90 | $6.38 | $60.00 | $12.00 |
| Spin Rinse Dryer | $47.85 | $19.14 | $90.00 | $36.00 |
| Bonders | $63.80 | $38.28 | $120.00 | $72.00 |
Cleanroom Entry Fee
| Per Day | |
|---|---|
| Entry Fee (Charged upon first entry into cleanroom. No time limits or charges for re-entry on same day.) |
$50.00 |
Training & Consultation
| External user Not-for-profit (per hour) |
External user Commercial (per hour) |
|
|---|---|---|
| Training & Consultation | $45.75 | $90.00 |