The GWNIC Nanofabrication Suite features state-of-the-art equipment for lithography, deposition, etching, thermal processes, measurement and characterization.
Highlights of the Nanofabrication Suite in Science and Engineering Hall
- Approximately 5,000 sq ft of Class 100 cleanroom
- Adjoins an approximately 4,000 square foot microscopy suite
- Slab-on-grade construction to minimize vibrations
- Passive and active shielding to prevent electromagnetic interference