Raith VOYAGER EBL

The Raith VOYAGER is a high performance electron beam lithography (EBL) instrument featuring:

• 50kV eWrite column technology
• 50MHz pattern generator
• 200mm wafer handling capability
• High throughput single digit nanolithography
• Stitch-free lithography due to fixed-beam-moving-stage (FBMS traxx) and modulated-beam-moving-stage (MBMS periodixx) technologies

 

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